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Novel Chemistry for Surface Engineering in Mems

Published online by Cambridge University Press:  17 March 2011

X.-Y. Zhu ,
Y. Jun ,
V. Boiadjiev ,
R. Major ,
H. I. Kim  and
J. E. Houston
X.-Y. Zhu
Affiliation:
Department of Chemistry, University of Minnesota, Minneapolis, MN 55455 Department of Chemistry, University of Minnesota, Minneapolis, MN [email protected]
Y. Jun
Affiliation:
Department of Chemistry, University of Minnesota, Minneapolis, MN 55455
V. Boiadjiev
Affiliation:
Department of Chemistry, University of Minnesota, Minneapolis, MN 55455
R. Major
Affiliation:
Department of Chemistry, University of Minnesota, Minneapolis, MN 55455
H. I. Kim
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
J. E. Houston
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
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Abstract

It is well recognized that controlling surface forces is one of the key issues in the design, fabrication, and operation of microelectromechanical systems (MEMS). In this report we present a novel strategy for the efficient assembly of organic monolayers onto silicon surfaces to control surface energy. This is achieved by the reaction between an alcohol functional group and a chlorinated Si surface. The resulting molecular monolayers are thermally and chemically stable. Surface adhesion energy on silicon is reduced by a factor of 40 by the monolayer coating and friction coefficient of the coated surface is only 0.013. The coatings are successfully demonstrated in adhesion reduction in a model MEMS structure: cantilever beam array (CBA). Polycrystalline beams with length up to 1.5 mm can be released.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE3.3
Copyright
Copyright © Materials Research Society 2001

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References

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