Published online by Cambridge University Press: 01 February 2011
Ink jet printheads are now widely used in manufacturing processes that require precise dispensing of materials. In response to requirements for dispensing novel electronic fluids, we are developing next generation jetting technology based on our silicon MEMS technology with a three-dimensional silicon technology and a piezo-based pumping chamber integrated into the chip structure. Examples of opportunities and applications in electronics packaging for MEMSbased ink jet technology will be presented.