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Non-lithographic Nanofabrication Using Porous Alumina Membranes

Published online by Cambridge University Press:  01 February 2011

K. Bhargavan Ram ,
L. Tian ,
Z Wu  and
Latika Menon
L. Tian
Affiliation:
[email protected], United States
Z Wu
Affiliation:
[email protected], United States
Latika Menon
Affiliation:
[email protected], Northeastern University, Physics, United States
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Abstract

We describe a fabrication method to prepare highly ordered Si nanopore arrays. A nanoporous alumina template of thickness ∼1μm is prepared by means of anodization of an aluminum film. The template has a highly ordered hexagonal array of pores of diameter ∼50nm. The template is detached from the aluminum layer and placed on a Si substrate. The nanoporous pattern is transferred onto silicon substrate by means of a dry plasma etch process. This produces an array of nanopores in silicon with a diameter of ∼50nm and depth of ∼300nm. We have used such an array to prepare Fe nanopillars inside the pores by means of thermal evaporation. Magnetization versus applied magnetic field measurements for the Fe nanoarrays, demonstrate large perpendicular anisotropy typical of high aspect ratio magnetic nanopillars. The value of coercivity is about 500Oe in the perpendicular direction and 40Oe in the parallel direction.

Keywords

nanostructuremagnetic propertiesreactive ion etching
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 900: Symposium O – Nanoparticles and Nanostructures in Sensors and Catalysis , 2005 , 0900-O06-12
Copyright
Copyright © Materials Research Society 2006

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References

REFERENCES

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