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Nonlinear Acoustic Response in thin Oxide Layers on Fused Silica

Published online by Cambridge University Press:  15 February 2011

C. R. Ottermann ,
S. U. Fassbender ,
W. Arnold  and
K. Bange
C. R. Ottermann
Affiliation:
Schott Glaswerke, R&D, P.O.Box 24 80, D-55014 Mainz, Germany
S. U. Fassbender
Affiliation:
Fraunhofer Institute for NDT, University Bldg. 37, D-66123 Saarbruecken Q-Net Quantity Management GmbH, Altenkesslerstr. 20, D-66115 Saarbruecken
W. Arnold
Affiliation:
Fraunhofer Institute for NDT, University Bldg. 37, D-66123 Saarbruecken
K. Bange
Affiliation:
Schott Glaswerke, R&D, P.O.Box 24 80, D-55014 Mainz, Germany
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Abstract

Nonlinear mechanical properties of layered systems of Ta2O5 and TiO2 films deposited on fused silica by reactive evaporation (RE), reactive ion plating (IP) and spin coating (SC) are investigated by means of an ultrasonic technique. The coatings with thickness of 100 nm possess differences in density and crystal structure, due to the different deposition conditions. The nonlinear acoustic response of the film/substrate systems depends on film material. Differences are observed in respect to film density as obtained by the alternate deposition methods. The origin of the differences in nonlinear acoustic response of the samples is discussed. The results are correlated to adhesion properties of the films determined by a scratch-test method.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 245
Copyright
Copyright © Materials Research Society 1997

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References

[1] Ottermann, C.R. et al., Mat. Res. Soc. Symp. Proc. Vol.308, 627 (1993); Vol. 356, 839 (1995)Google Scholar
[2] Pangraz, S. and Arnold, W., Review of Progress in QNDE 13B, eds. Thompson, D.O. and Chimenti, D.E., Plenum Press N.Y., 1995 (1994)Google Scholar
[3] Pangraz, S., PhD-Thesis, University of Saarbruecken, Technical Faculty and Fraunhofer IzfP-report 9501 17-TW (1995), in German Google Scholar
[4] Bange, K. et al., BMIFT-Abschluβbericht FKZ 13 N 5476/6 (1991)Google Scholar
[5] Arfsten, N., Lintner, B., Heming, M., Anderson, O. and Ottermann, C.R., Mat. Res. Soc. Symp. Proc. Vol.271, 449 (1992)Google Scholar
[6] Ottermann, C.R., Temmink, A., and Bange, K., Proc. SPIE 1272, 111 (1990)Google Scholar
[7] Baba, S., Kikuchi, A. and Kinbara, K., J. Vac. Sci. Techn. A4, 3059 (1986); A5, 1860 (1987)Google Scholar
[8] Ottermann, C.R. and Bange, K., in preparationGoogle Scholar