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Non-Equilibrium Modeling and Dissipative Structures in Solid Material - Plasma Interactions

Published online by Cambridge University Press:  15 February 2011

Yu.L. Khait
Yu.L. Khait*
Affiliation:
Department of Physics, Ben Gurion University of the Negev, Beer Sheva, Israel.
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Abstract

Topics discussed: (a) The dissipative structure (DS) composed of the plasma bulk (PB), near-to-surface plasma layer (PL), surface and the adjacent material layer (ML) coupled by mass, electric charge, etc. fluxes and applications to plasma deposition. (b) The transient local dissipative structure (TLDS) formed by a single plasma ion impinging on the surface and associated with sputtering, etc.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 30: Symposium L – Plasma Processing and Synthesis of Materials I , 1983 , 263
Copyright
Copyright © Materials Research Society 1984

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References

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