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Nitrogen-Oxygen Complexes in Silicon
Published online by Cambridge University Press: 26 February 2011
Abstract
Several series of optical absorption lines are found in the wavenumber range 190–270 1/cm in as-grown crytals of n-type Si involving oxygen and nitrogen simultaneously. They are related to the electronic transitions associated with five kinds of shallow donors each consisting of nitrogen and oxygen atoms (N-O complex). The analysis of the generation kinetics shows that the complex of the main type consists of one oxygen atom and two or three pairs of nitrogen atoms.
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- Copyright © Materials Research Society 1988
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