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Next Generation Processes and Equipment that Lead to Positive Environment, Safety, and Health Impacts
Published online by Cambridge University Press: 10 February 2011
Abstract
The technology development needed to support the continuous improvement of Environment, Safety, and Health (ESH) characteristics of semiconductor manufacturing facilities is changing as strategies for source reduction and incident prevention and more refined schemes for assessing ESH improvement emerge. This paper summarizes the changes taking place in ESH management structure and focuses on examples of current technology development to satisfy the new model of ESH execution.
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- Copyright © Materials Research Society 1997