No CrossRef data available.
Article contents
A New Development Of Scanning Hydrogen Imaging System And Its Application
Published online by Cambridge University Press: 10 February 2011
Abstract
Scanning type electron-stimulated desorption (ESD) spectroscopy to detect hydrogen on solid surfaces has been described. To analyze a two-dimensional distribution of hydrogen on solid surface, a pencil-type fine-focused electron gun, of which spot size is less than 300 nm at 800 eV, has been developed using a thermal field emitter. The lateral resolution of analysis is achieved less than 1 μm.
Letters were drawn on a hydrogen-terminated Si(100) surface by irradiation of continuous electron beam to remove hydrogen from the surface, and by the following scanning ESD measurement, a clear letters were confirmed on this surface. Direct lithography by an electron beam on silicon surfaces has been realized.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1998