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A New Approach to Atomic Force Microscopy

Published online by Cambridge University Press:  21 February 2011

Nabil M. Amer
Nabil M. Amer*
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

A highly sensitive and simple optical method for detecting the cantilever deflection in atomic force microscopy is described. The method was incorporated in an atomic force microscope and imaging and force measurements, in ultra-high vacuum and in air, were sucessfully performed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989 , 229
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES:

1. Binnig, G., Rohrer, H., Gerber, Ch., and Weibel, E., Phys. Rev. Lett. 49, 57 (1982)Google Scholar
2. Binnig, G., Quate, C. F., and Gerber, Ch., Phys. Rev. Lett. 56, 930 (1986).Google Scholar
3. AFM is also capable of imaging conductors and semiconductors.Google Scholar
4. McClelland, G. M., Erlandsson, R., and Chiang, S., “Reviewof Progress in Quantitative Non-D2estruct/ve Evaluation, ” Thompson, D.O. and Chimenti, D.E., Edits. (Plenum Press, New York, 1987), Vol.6, p 1307.Google Scholar
5. Martin, Y., Williams, C. C., and Wickramasinghe, H. K., J. Appl. Phys. 61, 4723 (1987).Google Scholar
6. Amer, N. M., J. Physique (Paris) C–6, 185 (1983); N. M. Amer and M. A. Olmstead, Surf. Sci. 132, 141 (1983); M. A. Olmstead, S. Kohn, N. M. Amer, D. Fournier, and A. C. Boccara, Appl. Phys. A 132 68 (1983).Google Scholar
7. Amer, N. M., Skumanich, A., and Ripple, D., Appl. Phys. Lett. 49, 137 (1986).Google Scholar
8. Amer, N. M. and Meyer, G., Bull. Amer. Phys. Soc. 33, 319 (1988); G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 1045 (1988); G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 2400 (1988).Google Scholar
9. As a numerical example, consider a 100μ × 100μ mirror with a mass of 2.3 × 10−10 kg and k =10 N/m, this additional mass limitst he resonance frequency of the combined cantilever-mirror system to the rather high value of 200 kHz.Google Scholar
10. Silicon Detector Corporation, Newbury Park, California.Google Scholar