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Nanotectonics: Direct Fabrication of All-Inorganic Logic Elements and Micro-Electro-Mechanical Systems from Nanoparticle Precursors

Published online by Cambridge University Press:  15 February 2011

Eric J. Wilhelm  and
Joseph Jacobson
Eric J. Wilhelm
Affiliation:
Massachusetts Institute of Technology, Media Lab, Cambridge, MA.
Joseph Jacobson
Affiliation:
Massachusetts Institute of Technology, Media Lab, Cambridge, MA.
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Abstract

The reduced melting point and high solubility of inorganic nanoparticles have been shown to be useful in the low-temperature solution-based fabrication of semiconductor devices. These inks have been patterned using various techniques to form inorganic logic elements, multi-layer structures, and MEMS. Here we report a new technique known as offset liquid embossing that is used to print the nanoparticle inks. Structures created include multiple layers of gold and spin-on-glass printed without the need for etching or planarization, and 100 nm resolution.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 769: Symposium H – Flexible Electronics - Materials and Device Technology , 2003 , H8.1
Copyright
Copyright © Materials Research Society 2003

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References

1 Ridley, B. A., Nivi, B., et al. (1999). “All-inorganic field effect transistors fabricated by printing.” Science 286(5440): 746–749.Google Scholar
2 Fuller, S. B., Wilhelm, E. J., et al. (2002). “Ink-jet printed nanoparticle microelectromechanical systems.” Journal of Microelectromechanical Systems 11(1): 54–60.Google Scholar
3 Bulthaup, C. A., Wilhelm, E. J., et al. (2001). “All-additive fabrication of inorganic logic elements by liquid embossing.” Applied Physics Letters 79(10): 1525–1527.Google Scholar
4 Xia, Y. N. and Whitesides, G. M. (1998). “Soft lithography.” Annual Review of Materials Science 28: 153–184.Google Scholar
5 Hayashi, C. (1987). “Ultrafine Particles.” Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films 5(4): 1375–1384.Google Scholar