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Nanostructure of a-Si:H and Related Materials by Small-Angle X-Ray Scattering

Published online by Cambridge University Press:  15 February 2011

D. L. Williamson
D. L. Williamson*
Affiliation:
Department of Physics, Colorado School of Mines, Golden, CO 80401
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Abstract

The use of small-angle x-ray scattering to examine nanostructural features of a-Si:H and the related alloys a-SiGe:H and a-SiC:H will be reviewed. A wide range of H, Ge, and C compositions has been investigated. The films examined came from several film- and device-making groups and represent current state-of-the-art solar cell material or attempts to develop improved and more stable material. A detailed comparison of the three classes of materials reveals dramatic differences in nanostructure. The diffuse component of the small-angle scattering, not recognized or discussed in previous small-angle scattering experiments on these materials by other groups, is shown to contain potentially valuable information on the atomic-scale structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 377: Symposium A – Amorphous Silicon Technology 1995 , 1995 , 251
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1. Moss, S.C. and Graczyk, J.F., Phys. Rev. Lett. 23, 1167 (1969).Google Scholar
2. Shevchik, N.J. and Paul, W., J. Non-Cryst. Solids 16, 55 (1974).Google Scholar
3. Cargill, G.S., Phys. Rev. Lett. 28, 1372 (1972).Google Scholar
4. Shevchik, N.J. and Paul, W., J. Non-Cryst. Solids 8–10, 381 (1972).Google Scholar
5. D'Antonio, P. and Konnert, J.H., Phys. Rev. Lett. 43, 1161 (1979).Google Scholar
6. Postoi, T.A., Falco, C.M., Kampwirth, R.T., Schuller, I.K., and Yelon, W.B., Phys. Rev. Lett. 45, 648 (1980).Google Scholar
7. Leadbetter, A.J., Rashid, A.A.M., Richardson, R.M., Wright, A.F., and Knights, J.C., Solid State Commun. 33, 973 (1980).Google Scholar
8. Bellissent, R., Chenevas-paule, A., and Roth, M., J. Non-cryst. Solids 59&60, 229 (1983).Google Scholar
9. Vanderhaghen, R., Chaurand, B., and Drevillon, B., Thin Solid Films 124, 293 (1985).Google Scholar
10. Craven, A.J., Patterson, A.M., Long, A.R., and Wilson, J.I.B., J. Non-Cryst. Solids 77 & 78 217 (1985).Google Scholar
11. Mahan, A.H., Williamson, D.L., Nelson, B.P., and Crandall, R.S., Solar Cells 27, 465 (1989).Google Scholar
12. Mahan, A.H., Chen, Y., Williamson, D.L., and Mooney, G.D., J. Non-Cryst. Solids 137 & 138, 65 (1991).Google Scholar
13. Muramatsu, S., Matsubara, S., Watanabe, T., Shimada, T., Kamiyama, T., Suzuki, K., and Matsuda, A., Jpn. J. Appl. Phys. 30, L2006 (1991).Google Scholar
14. Muramatsu, S., Shimada, T., Kajiyama, H., Azuma, K., Watanabe, T., Kamiyama, T., Suzuki, K., Jpn. J. Appl. Phys. 28, L1092 (1989).Google Scholar
15. Jones, S.J., Chen, Y., Williamson, D.L., and Mooney, G.D., Mat. Res. Soc. Symp. Proc. 258, 229 (1992).Google Scholar
16. Jones, S.J., Chen, Y., Williamson, D.L., Zedlitz, R., and Bauer, G., Appl. Phys. Lett. 62, 3267 (1993).Google Scholar
17. Williamson, D.L., Mahan, A.H., Nelson, B.P., and Crandall, R.S., Appl. Phys. Lett. 55, 783 (1989).Google Scholar
18. Carreno, M.N.P., Pereyra, I., Fantini, M.C.A., Takahashi, H., and Landers, R., J. Appl. Phys. 75, 538 (1994).Google Scholar
19. Chenavas-Paule, A., Bellissent, R., Roth, M., and Pankove, J.I., J. Non-Cryst. Solids 77 & 78, 373 (1985).Google Scholar
20. Bellissent, R., in Amorphous Silicon and Related Materials, edited by Fritzsche, H. (World Scientific, Singapore, 1988) p. 93.Google Scholar
21. Williamson, D.L., Chen, Y., and Jones, S.J., in 12th NREL Photovoltaic Program Review, AIP Conf. Proc. No. 306, Edited by Noufi, R. and Ullal, H.S. (AIP, New York, 1994) p. 442.Google Scholar
22. Guha, S., Yang, J., Jones, S.J., Chen, Y., and Williamson, D.L., Appl. Phys. Lett. 61, 1444 (1992).Google Scholar
23. Jones, S.J., Chen, Y., Willamson, D.L., Xu, X., Yang, J., and Guha, S., Mat. Res. Soc. Symp.proc. 297, 815 (1993).Google Scholar
24. Jones, S.J., Chen, Y., Williamson, D.L., Kroll, U., and Roca i Cabarrocas, P., J. Non-Cryst. Solids 164–166, 131 (1994).Google Scholar
25. Chattopadhyay, S., Sharma, S.N., Banerjee, R., Bhusari, D.M., Kshirsagar, S.T., Chen, Y., and Williamson, D.L., J. Appl. Phys. 76, 5208 (1994).Google Scholar
26. Middya, A.R., Ray, S., Jones, S.J., and Williamson, D.L. (submitted for publication).Google Scholar
27. Wickboldt, P., Pang, D., Paul, W., Chen, J.H., Zhong, F., Cohen, J.D., Chen, Y., and Williamson, D.L. (submitted to ICAS'95).Google Scholar
28. see e.g., Fegin, L.A. and Svergun, D.I., Structure Analysis by Small-Angle X-ray and Neutron Scattering (Plenum, New York, 1987), and references therein.Google Scholar
29. Shibayama, M., Nomura, S., Hashimoto, T., and Thomas, E.L., J. Appl. Phys. 66, 4188 (1989).Google Scholar
30. Ashcroft, N.W. and Lekner, J., Phys. Rev. 145, 83 (1966).Google Scholar
31. Warren, B.E., X-ray Diffraction (Dover, New York, 1969) p. 174.Google Scholar
32. Freeman, A.J., Acta Cryst. 12, 929 (1959).Google Scholar
33. Levelut, A.M. and Guinier, A., in Small-Angle X-ray Scattering, Edited by Brumberger, H. (Gordon and Breach, New York, 1967) p. 351.Google Scholar
34. Schwartz, L.H. and Cohen, J.B., Diffraction from Materials (Springer, Berlin, 1987) p. 402.Google Scholar
35. Warren, B.E., Acta Cryst. 12, 837 (1959).Google Scholar
36. Gerold, V., in Small-Angle X-ray Scattering, Edited by Brumberger, H. (Gordon and Breach, New York, 1967) p. 277.Google Scholar
37. Hendricks, R.W., Mardon, P.G., and Shaffer, L.B., J. Chem. Phys. 61, 319 (1974).Google Scholar
38. Mahan, A.H., Williamson, D.L., Nelson, B.P., and Crandall, R.S., Phys. Rev. B 40, 12024 (1989).Google Scholar
39. Custer, J.S., Thompson, M.O., Jacobson, D.C., Poate, J.M., Roorda, S., Sinke, W.C., and Spaepen, F., Appl. Phys. Lett. 64, 437 (1994).Google Scholar
40. Dismukes, J.P., Ekstrom, L., and Paff, R.J., J. Phys. Chem. 68, 3021 (1964).Google Scholar
41. Crandall, R.S., Xu, Yueqin, Mahan, A.H., et al (private communication).Google Scholar
42. Ross, R.C., Johncock, A.G., and Chan, A.R., J. Non-Cryst. Solids 66, 81 (1984).Google Scholar
43. McKinnon, A.W., Baker, S., and Weiland, M.E., J. Non-Cryst. Solids 139, 157 (1992).Google Scholar
44. Tanenbaum, D., Laracuente, A., and Gallagher, A.C., Mat. Res. Soc. Symp. Proc. 336, 49 (1994).Google Scholar
45. Acco, S., Williamson, D.L., Stolk, P.A., et al (unpublished).Google Scholar
46. Williamson, D.L., Roorda, S., Chicoine, M., Tabti, R., Stolk, P.A., Acco, S., and Saris, F.W. (submitted for publication).Google Scholar
47. Peisl, J., Franz, H., Schmalzbauer, A., and Wallner, G., Mat. Res. Soc. Symp. Proc. 209, 271 (1991).Google Scholar
48. Boyce, J.B. and Ready, S.E., Physica B 170, 305 (1991).Google Scholar
49. Yang, J., Xu, X., and Guha, S., Mat. Res. Soc. Symp. Proc. 336, 687 (1994).Google Scholar
50. Knights, J.C. and Lujan, R.A., Appl. Phys. Lett. 35, 244 (1979).Google Scholar
51. Mahan, A.H. and Vanecek, M., in Amorphous Silicon Materials and Solar Cells, AIP Conf. Proc. No. 234, Edited by Stafford, B.L. (AIP, New York, 1991) p. 195.Google Scholar
52. Paul, W., Chen, J.H., Liu, E.Z., Wetzel, A.E. and Wickboldt, P., J. Non-Cryst. Solids 164–166, 1 (1993).Google Scholar
53. Guha, S. and Yang, J. (private communication).Google Scholar
54. Guha, S., Yang, J., Nath, P., and Hack, M., Appl. Phys. Lett. 49, 218 (1986).Google Scholar
55. Jones, K.M. (private communication).Google Scholar
56. Schubert, M.B. and Bauer, G.H., Phil. Mag. B 62, 59 (1990).Google Scholar
57. Yang, L., Newton, J., and Fieselmann, B., Mat. Res. Soc. Symp. Proc. 149, 497 (1989).Google Scholar
58. Incoccia, L., Mobilio, S., Proietti, M.G., Fiorini, P., Giovanella, C., and Evangelisti, F., Phys. Rev. B 31, 1028 (1985).Google Scholar
59. Nishino, Y., Muramatsu, S., Takano, Y., and Kajiyama, H., Phys. Rev. B 38, 1942 (1988).Google Scholar
60. Epperson, J.E. and Thiyagarajan, P., J. Appl. Cryst. 21, 652, (1988).Google Scholar
61. Efstathiadis, H., Yin, Z., and Smith, F.W., Phys. Rev. B 46, 13119 (1992).Google Scholar
62. Shinar, J., Jia, H., Shinar, R., Chen, Y., and Williamson, D.L., Phys. Rev. B 50, 7358 (1994).Google Scholar