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Nanoscale Structure/Property Correlation Through Aberration-Corrected Stem And Theory
Published online by Cambridge University Press: 11 February 2011
Extract
The combination of atomic-resolution Z-contrast microscopy, electron energy loss spectroscopy and first-principles theory has proved to be a powerful means for structure property correlations at interfaces and nanostructures. The scanning transmission electron microscope (STEM) now routinely provides atomic-sized electron beams, allowing simultaneous Z-contrast imaging and EELS as shown in Fig. 1. The feasiblity of correcting the inherently large spherical aberration of microscope objective lenses promises to at least double the achievable resolution. The potential benefits for the STEM, however, may turn out to be much greater than those for the conventional TEM because it is very much less sensitive to chromatic instabilities. The 100 kV VG Microscopes HB501UX at Oak Ridge National Laboratory (ORNL) is now fitted with an aberration corrector constructed by Nion Co., which improved its resolution from 2.2 Å (full-width-half-maximum probe intensity) to around 1.3 Å. It is now very comparable in performance to the uncorrected 300 kV HB603U STEM at ORNL which, before correction, also had a directly interpretable resolution of 1.3 Å, although information transfer had been demonstrated down to 0.78 Å8. Initial results after installing an aberration corrector on the 300 kV STEM indicate a resolution of 0.84 Å. The theoretically achievable probe size in the absence of instabilities is predicted to be 0.5 Å.
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- Copyright © Materials Research Society 2003
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