Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-25T15:40:38.858Z Has data issue: false hasContentIssue false
  • English
  • Français

Nano-Scale Devices Embedded in Self-Supporting Polymer Foils

Published online by Cambridge University Press:  17 March 2011

R. Könenkamp ,
J. Chen ,
S. Klaumuenzer  and
R. Engelhardt
R. Könenkamp
Affiliation:
Physics Department, Portland State University, Portland, OR. 97201, USA
J. Chen
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Strasse 100, 14109 Berlin, Germany
S. Klaumuenzer
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Strasse 100, 14109 Berlin, Germany
R. Engelhardt
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Strasse 100, 14109 Berlin, Germany
Get access

Abstract

Self-supporting polymer foils of several micrometer thickness have been structured using irradiation by fast heavy ions and subsequent etching. Very deep, well defined nanostructures can be prepared in this way. These can then be used as templates for semiconductor deposition and the fabrication of robust embedded electronic devices. Electron microscopy shows void- filling poly-crystalline growth in the polymer films. Electrical experiments show low sensitivity when mechanical forces are exerted on the foil, suggesting that the embedded nano- devices can be used as reliable sensors in applications with considerable bending of the foils. Two different transistor arrangements will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 814: Symposium I – Flexible Electronics 2004-Materials and Device Technology , 2004 , I7.4
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Hulteen, J. C., Martin, C. R., J. Mater. Chem. 7, 1075 (1997).Google Scholar
2. Dobrev, D., Vetter, J., and Angert, N., Nucl. Instrum. Methods Phys. Res. B 149, 207 (1999).Google Scholar
3. Engelhardt, R. and Könenkamp, R., J. Appl. Phys. 90, 4287 (2001)Google Scholar
4. Apel, P.Yu. and Pretsch, G., Nucl. Tracks Readiat. Meas., 11, 45 (1986).Google Scholar
5. Steckenreiter, T., Balanzat, E., Fuess, H., and Trautmann, C., J. Polym. Sci. A, Polym. Chem. 37, 4318 (1999).Google Scholar
6. Rost, C., diploma thesis, Physics Department, Freie Universitét Berlin, 1999.Google Scholar
7. Chen, J. and Könenkamp, R., Appl. Phys. Lett. 82, 4782 (2003)Google Scholar
8. Cepak, V. M. and Martin, C. R., Chem. Mater. 11, 1363 (1999)Google Scholar