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Nano-Scale Devices Embedded in Self-Supporting Polymer Foils

Published online by Cambridge University Press:  17 March 2011

R. Könenkamp ,
J. Chen ,
S. Klaumuenzer  and
R. Engelhardt
R. Könenkamp
Affiliation:
Physics Department, Portland State University, Portland, OR. 97201, USA
J. Chen
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Strasse 100, 14109 Berlin, Germany
S. Klaumuenzer
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Strasse 100, 14109 Berlin, Germany
R. Engelhardt
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Strasse 100, 14109 Berlin, Germany
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Abstract

Self-supporting polymer foils of several micrometer thickness have been structured using irradiation by fast heavy ions and subsequent etching. Very deep, well defined nanostructures can be prepared in this way. These can then be used as templates for semiconductor deposition and the fabrication of robust embedded electronic devices. Electron microscopy shows void- filling poly-crystalline growth in the polymer films. Electrical experiments show low sensitivity when mechanical forces are exerted on the foil, suggesting that the embedded nano- devices can be used as reliable sensors in applications with considerable bending of the foils. Two different transistor arrangements will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 814: Symposium I – Flexible Electronics 2004-Materials and Device Technology , 2004 , I7.4
Copyright
Copyright © Materials Research Society 2004

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