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Nanoporous Polyimide Films from Polyimide-Aliphatic Polyester or Polyimide-Aliphatic Polycarbonate Copolymers

Published online by Cambridge University Press:  10 February 2011

K. R. Carter ,
J. L. Hedrick ,
R. Richter ,
P. T. Furuta ,
D. Mecerreyes  and
R. Jérôme
K. R. Carter
Affiliation:
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
J. L. Hedrick
Affiliation:
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
R. Richter
Affiliation:
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
P. T. Furuta
Affiliation:
IBM Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
D. Mecerreyes
Affiliation:
Université de I'Etat a Liége, Liége, Belgium.
R. Jérôme
Affiliation:
Université de I'Etat a Liége, Liége, Belgium.
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Abstract

We have explored polyimide foams created using a block copolymer approach as part of our research efforts to obtain thin film dielectric layers with very low dielectric constants for use in microelectronic devices. In these systems the pore sizes are in the nanometer range thus the term “nanofoam”, The polyimide foams are prepared from phase separated block copolymers consisting of thermally stabile and thermally labile blocks, the latter being the dispersed phase. Foam formation is effected by thermolysis of the labile block leaving pores the size and shape corresponding to the initial copolymer morphology. Polyimide nanofoams generated from thermolysis of polyimidealiphatic polyester and polyimide-aliphatic polycarbonate copolymers were investigated. The aliphatic co-blocks were synthesized by ring opening polymerization of the cyclic monomers, such as E-caprolactone, valerolactone, trimethylene carbonate, and L-lactide. The aliphatic blocks were designed in such a way as to allow for incorporation into polyimide copolymers. The foams were characterized by a variety of techniques including, TEM, SAXS, WAXD, DMTA, density and refractive index measurements.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 431: Symposium P – Microporous and Macroporous Materials , 1996 , 487
Copyright
Copyright © Materials Research Society 1996

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References

1. Polymers for Electronic Applications, edited by Lai, J, H. (CRC Press, Boca Raton, Florida, 1989).Google Scholar
2. Smearing, R. W. and Floryan, D. C., US Patent No. 4 535 365 (1985).Google Scholar
3. Krutchen, C. M. and Wu, P., US Patent No. 4 535 100 (1985).Google Scholar
4. Hoki, T. and Matsuki, Y., European Patent No. 186308 (1986).Google Scholar
5. Meyers, R. A., J. Polym. Sci. A–1.7, 2757 (1969).Google Scholar
6. Carleton, P. S., Farrisey, W. J. and Rose, J. S., J. Appl. Polym. Sci. 16, 2983 (1972).Google Scholar
7. Narkis, M., Paterman, M., Boneh, H. and Kenig, S., Polym. Eng. Sci. 22, 417 (1982).Google Scholar
8. Gagliani, J. and Supkis, D. E., Adv. Astronaut. Sci. 38, 193 (1979).Google Scholar
9. Carter, K. R., Cha, H. J., DiPietro, R. A., Hawker, C. J., Hedrick, J. L. Labadie, J. W., McGrath, J. E., Russell, T. P., Sanchez, M. I., Swanson, S. A., Volksen, W., Yoon, D. Y. in ”Low-Dielectric Constant Materials-Synthesis and Applications in Microekectronics” edited by Lu, T. -M., Murarka, S. P., Kuan, T. -S., Ting, C. H. (Mater. Res. Soc. Proc. 381, Pittsburgh, PA, 1995) pp. 79.Google Scholar
10. Hedrick, J. L.; Russell, T. P.; Labadie, J. W., Lucas, M., Swanson, S. Polymer, 1995, 36, 265.Google Scholar
11. Hedrick, J. L.; DiPietro, R.; Charlier, Y.; Jérôme, R. High Perform. Polym., 1995, 7, 133.Google Scholar
12. McNeil, I. C.; Leiper, H. A. Poly. Deg. and Stab., 1985, 11, 267.Google Scholar
13. McNeil, I. C.; Rincon, A. Poly. Deg. and Stab., 1989, 24, 59.Google Scholar
14. Dubois, P., Jérôme, R. and Teyssié, P., Makromol. Chem., Macromol. Symp. 42/43, 103 (1991).Google Scholar
15. Carter, K. R; Richter, R.; Hedrick, J. L.; McGrath, J. E.; Mecerreyes, D; Jérôme, R. Polym. Prep., 1996, 37(1), 607.Google Scholar
16. Russell, T. P., Sanchez, M. I. and Hedrick, J. L., J. Polym Sci., Phys. Chem. 33(2), 247 (1995).Google Scholar