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Nanoparticle Metal-Oxide Films on Microhotplate Platforms: Fabrication and Gas-Sensitive Properties

Published online by Cambridge University Press:  01 February 2011

Alexey Tomchenko  and
Brent Marquis
Alexey Tomchenko
Affiliation:
[email protected], Sensor Research and Development Corp., Microelectronics, 17 Godfrey Dr., Orono, ME, 04473, United States, (207) 866-0100
Brent Marquis
Affiliation:
[email protected], Sensor Research and Development Corp., Orono, ME, 04473, United States
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Abstract

In this presentation, we discuss the development of nanostructured sensor materials based on nanoparticulate metal-oxide suspensions deposited onto MEMS μHPs by microprinting. The preparation of the suspensions is described; the precise control over the thickness of the films through the composition of the metal-oxide suspensions is demonstrated. The procedure of microprinting is described. The deposited films are evaluated as chemical sensors. The sensor performance of the microsensors – sensitivity, stability, speed of operation, and selectivity – is compared with that of analogous traditional thick-film sensors.

Keywords

semiconductingsensoroxide
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 915: Symposium R – Nanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications , 2006 , 0915-R07-12
Copyright
Copyright © Materials Research Society 2006

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