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Nanoindentation of Microspring Thin Films

Published online by Cambridge University Press:  17 March 2011

Mary W. Seto ,
Brian Dick  and
Michael J. Brett
Mary W. Seto
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta T6G 2G7, Canada
Brian Dick
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta T6G 2G7, Canada
Michael J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta Edmonton, Alberta T6G 2G7, Canada
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Abstract

Porous thin films with helical microstructures were fabricated with the Glancing Angle Deposition technique. These films consisted of arrays of “microsprings” whose geometries could be engineered with nanometer scale control. Some of the mechanical properties of these helically structured films were studied with a nanoindentation technique. Several microscopic “springbed” films were tested over a range of forces using a spherical indenter tip. The geometries of the microsprings were varied, and a number of different materials were used to fabricate these films, which were typically a few micrometers thick. Slanted post arrays, resembling micro-cantilevers, were also subjected to nanoindentation tests. Results of initial experiments, theory, and simulations show that these microstructures behave in a manner analogous to macroscopic springs and cantilevers, and may offer some insight into how materials behave at the microscale.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE5.15
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

1. Robbie, K., Friedrich, L. J., Dew, S. K., Smy, T., and Brett, M. J., J. Vac. Sci. Technol. A 13, 1032 (1995).Google Scholar
2. Lakhtakia, A., Messier, R., Brett, M. J., and Robbie, K., Innovations in Materials Research 1, 165 (1996).Google Scholar
3. Sit, J. C., Vick, D., Robbie, K., and Brett, M. J., J. Mater. Res. 14, 1197 (1999).Google Scholar
4. Vick, D., Tsui, Y. Y., Brett, M. J., and Fedosejevs, R., Thin Solid Films 350, 49 (1999).Google Scholar
5. Robbie, K., and Brett, M. J., J. Vac. Sci. Technol. A 15, 1460 (1997).Google Scholar
6. Seto, M. W., Robbie, K., Vick, D., Brett, M. J., and Kuhn, L., J. Vac. Sci. Technol. B 17, 2171 (1999).Google Scholar
7. Roark, R., Roark's Formulas for Stress and Strain, 6th ed. (McGraw-Hill, New York, 1989), p. 386.Google Scholar
8. Liu, F., Umlor, M. T., Shen, L., Weston, J., Eads, W., Barnard, J. A., and Mankey, G. J., J. App. Physics 85, 5486 (1999).Google Scholar
9. Malac, M., Egerton, R. F., Brett, M. J., and Dick, B., J. Vac. Sci. Technol. B 17, 2671 (1999).Google Scholar
10. Dick, B., Brett, M. J., Smy, T. J., Freeman, M. R., Malac, M., and Egerton, R. F., J. Vac. Sci. Technol. A 18, 1838 (2000).Google Scholar
11. Kreith, F., The CRC Handbook of Mechanical Engineering, (CRC Press Inc, Boca Raton, 1998), p. 1–83.Google Scholar