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Nanoimprint Lithography with UV-Curable Hyperbranched Polymer Nanocomposites for Optical Biosensing Applications

Published online by Cambridge University Press:  01 February 2011

Valérie Geiser ,
Yves Leterrier ,
Jan-Anders Månson ,
Rosendo Sanjines ,
Guy Voirin  and
Max Wiki
Valérie Geiser
Affiliation:
[email protected], EPFL, Lausanne, Switzerland
Yves Leterrier
Affiliation:
[email protected]
Jan-Anders Månson
Affiliation:
[email protected], EPFL, Lausanne, Switzerland
Rosendo Sanjines
Affiliation:
[email protected], EPFL, Lausanne, Switzerland
Guy Voirin
Affiliation:
[email protected], CSEM, Neuchâtel, Switzerland
Max Wiki
Affiliation:
[email protected], Dynetix AG, Landquart, Switzerland
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Abstract

Polymer nanocomposite gratings with a 363 nm period and a 12 nm step height were replicated using a glass master in a rapid, low-pressure imprint process. The composite materials were based on a UV-curable acrylated hyperbranched polymer and nanosized SiO2 particles. The influence of particle fraction up to 25 vol%, process pressure and UV intensity on the grating geometry was analyzed using atomic force microscopy. The period of the grating was found to be identical to that of the glass master for all investigated conditions. It was shown that the gel point of the nanocomposite was an important factor that determined the stability as well as the dimensions of the imprinted structure. However, a distortion of the grating was observed with increasing fraction of SiO2, which was correlated to the increased internal stress of the composite. Wavelength interrogated optical sensors were produced by depositing a high refractive index TiO2 layer on the composite gratings. The laser signal strength of the polymer sensors was equal to that of the reference high precision glass sensor with 10-12 g/mm2 sensitivity. The strength was lower for the nanocomposites due to propagation losses argued to result from residual porosity.

Keywords

compositenanostructuredevices
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1253: Symposium K – Functional Materials and Nanostructures for Chemical and Bochemical Sensing , 2010 , 1253-K11-03
Copyright
Copyright © Materials Research Society 2010

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