Hostname: page-component-745bb68f8f-l4dxg Total loading time: 0 Render date: 2025-01-28T23:20:19.451Z Has data issue: false hasContentIssue false
  • English
  • Français

Nano-Creep Test for Anatase Polycrystalline Films

Published online by Cambridge University Press:  21 March 2011

Hironori Sugata ,
Shigeo Ohshio  and
Hidetoshi Saitoh
Hironori Sugata
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata, 940-2188, JAPAN
Shigeo Ohshio
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata, 940-2188, JAPAN
Hidetoshi Saitoh
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata, 940-2188, JAPAN
Get access

Abstract

We introduce an analytical technique for time-dependent deformation behavior of the polycrystalline films using a nano-indenter. This technique permits evaluation of structural deformation of the nanometer scale of the thin films. In this paper, good accuracy conditions were determined to measure deformation behavior of the polycrystalline films. The polycrystalline films of anatase were used to investigate the grain boundary structure. We prove that the analysis of time-dependent deformation behavior is effective to investigate the structure of the polycrystalline films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L4.7.1
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tanaka, D., Ohshio, S. and Saitoh, H., Jpn. J. Appl. Phys. 39, 6008–6015 (2000).Google Scholar
2. Tanaka, N., Ohshio, S. and Saitoh, H., J. Ceram. Soc. Japan. 105 [7], 551–554 (1997).Google Scholar
3. Saitoh, H., Sunayama, H., Tanaka, N. and Ohshio, S.. Soc. Japan. 106 [11], 1051–1055 (1998).Google Scholar