Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-25T17:58:34.347Z Has data issue: false hasContentIssue false
  • English
  • Français

Multilayer Epitaxial Ferroelectric nx(SrTiO3/PbTiO3) Thin Films Prepared By The Sol-Gel Technique

Published online by Cambridge University Press:  15 February 2011

Yudan Lou ,
Yuhuan Xu  and
John D. Mackenzie
Yudan Lou
Affiliation:
Dept. of Materials Science and Engineering, University of California, Los Angeles, CA 90024
Yuhuan Xu
Affiliation:
Dept. of Materials Science and Engineering, University of California, Los Angeles, CA 90024
John D. Mackenzie
Affiliation:
Dept. of Materials Science and Engineering, University of California, Los Angeles, CA 90024
Get access

Abstract

Multilayer epitaxial ferroelectric PbTiO3 and SrTiO3 thin films were grown alternatively on single crystal SrTiO3 (001) substrate by the sol-gel technique in this study. Lead titanium double metal alkoxide and strontium titanium double metal alkoxide were used for dip coating. By controlling the dip coating speed and the concentration of sol-gel solution, different thickness of films was obtained. The average thickness of each PbTiO3 or SrTiO3 layer was 120 Å which was measured by SEM method. By using XRD the structure of the epitaxial multilayer films was examined. The epitaxial PbTiO3 and SrTiO3 thin films could be obtained at 700°C and 800°C respectively. The change of transmittance with wavelength on 12( 6×[SrTiO3/PbTiO3]) layer films was measured. The structure and the optical properties of the films were discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 341: Symposium F – Epitaxial Oxide Thin Films and Heterostructures , 1994 , 367
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Esaki, L., “A bird's-eye view on the evolution of semiconductor superlattices and quantum wells,” IEEE J. Quantum Electronics, QE–22, No.9, 1611–1624, Sep. 1986.Google Scholar
[20 Xu, Yuhuan, Mackenzie, J. D., “Ferroelectric thin films prepared by sol-gel processing,” Integrated Ferroelectrics, 1, 17–42, 1992.Google Scholar
[3] Seifert, A. et al., “Epitaxial PbTiO3 thin films on {001} SrTiO3 from mixed alkoxides,” 1994, (Reported on MRS spring meeting, San Francisco)Google Scholar
[4] Cheng, Chih-Hsing, Xu, Yuhuan and Mackenzie, J. D., “The growth of single crystal-like and polycrystal KNbO3 films via sol-gel process,” Mat. Res. Soc. Symp. Proc., 271, 383–388, 1992.CrossRefGoogle Scholar
[51 Gardiner, R., and Kirlin, Peter S., “Chemical vapor deposition of epitaxial BaTiO3 films for frequency doubling devices,” Mat. Res. Soc. Symp. Proc., Ferroelectric thin films, 310, 119–124, San Francisco, Apr. 1993.Google Scholar
[6] Yoshimoto, M. et al., “Molecular layer epitaxy of perovskite based oxides by laser MBE,” 1994, (Poster at MRS spring meeting, San Francisco).CrossRefGoogle Scholar
[7] Shaw, T. M. et al., “The growth and characterization of SrTiO3/BaTiO3 multilayers,” 1994, (Reported on 6th Int. Symp. Integrated Ferroelectrics, Monterey).Google Scholar