Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Hapke, P.
Finger, F.
Luysberg, M.
Carius, R.
and
Wagner, H.
1994.
Large Grain Size and High Deposition Rate for Microcrystalline Silicon Prepared by VHF-GD.
MRS Proceedings,
Vol. 358,
Issue. ,
Meier, J.
Dubail, S.
Fluckiger, R.
Fischer, D.
Keppner, H.
and
Shah, A.
1994.
Intrinsic microcrystalline silicon (μc-Si:H)-a promising new thin film solar cell material.
Vol. 1,
Issue. ,
p.
409.
Fivaz, M
Brunner, S
Schwarzenbach, W
Howling, A A
and
Hollenstein, C
1995.
Reconstruction of the time-averaged sheath potential profile in an argon radiofrequency plasma using the ion energy distribution.
Plasma Sources Science and Technology,
Vol. 4,
Issue. 3,
p.
373.
Van Sark, W.G.J.H.M.
Bezemer, J.
Heller, E. M. B.
Kars, M.
and
Van Der Weg, W. F.
1995.
The Influence of Frequency and Pressure on the Material Quality of PECVD A-SI:H.
MRS Proceedings,
Vol. 377,
Issue. ,
Finger, F.
Carius, R.
Hapke, P.
Houben, L.
Luysberg, M.
and
Tzolov, M.
1996.
Growth and Structure of Microcrystalline Silicon Prepared with Glow Discharge at Various Plasma Excitation Frequencies.
MRS Proceedings,
Vol. 452,
Issue. ,
Kroll, U
Meier, J
Torres, P
Pohl, J
and
Shah, A
1998.
From amorphous to microcrystalline silicon films prepared by hydrogen dilution using the VHF (70 MHz) GD technique.
Journal of Non-Crystalline Solids,
Vol. 227-230,
Issue. ,
p.
68.
Shirai, Hajime
Fukuda, Yusuke
Nakamura, Takuya
and
Azuma, Kazuhumi
1999.
Effect of GeF4 addition on the growth of hydrogenated microcrystalline silicon film by plasma-enhanced chemical vapor deposition.
Thin Solid Films,
Vol. 350,
Issue. 1-2,
p.
38.
Shah, A.
Vallat-Sauvain, E.
Torres, P.
Meier, J.
Kroll, U.
Hof, C.
Droz, C.
Goerlitzer, M.
Wyrsch, N.
and
Vanecek, M.
2000.
Intrinsic microcrystalline silicon (μc-Si:H) deposited by VHF-GD (very high frequency-glow discharge): a new material for photovoltaics and optoelectronics.
Materials Science and Engineering: B,
Vol. 69-70,
Issue. ,
p.
219.
Sark, Wilfried G.J.H.M. van
2002.
Handbook of Thin Films.
p.
1.
Van Sark, Wilfried G.J.H.M.
2002.
Advances in Plasma-Grown Hydrogenated Films.
Vol. 30,
Issue. ,
p.
1.
Mukherjee, C
Anandan, C
Seth, T
Dixit, P.N
and
Bhattacharyya, R
2003.
Photoconducting a-Si:H films grown at high deposition rates by pulsing a VHF 100 MHz discharge.
Thin Solid Films,
Vol. 423,
Issue. 1,
p.
18.
Meier, J.
Kroll, U.
Vallat-Sauvain, E.
Spitznagel, J.
Graf, U.
and
Shah, A.
2004.
Amorphous solar cells, the micromorph concept and the role of VHF-GD deposition technique.
Solar Energy,
Vol. 77,
Issue. 6,
p.
983.
Chaudhary, Deepika
Sharma, Mansi
Sudhakar, S.
and
Kumar, Sushil
2017.
Plasma Impedance Analysis: A Novel Approach for Investigating a Phase Transition from a-Si:H to nc-Si:H.
Plasma Chemistry and Plasma Processing,
Vol. 37,
Issue. 1,
p.
189.
Stephan, Ulf
Steinke, Olaff
Ushakov, Andrey
Verlaan, Ad
Yatsuka, Eiichi
Yokoyama, Masahito
Rijfers, André
Ribeiro, Diogo
Moser, Lucas
Bassan, Michele
Maniscalco, Matthew P.
van Beekum, Erik
and
Hatae, Takaki
2022.
Design and analysis of first mirror plasma cleaning electrical circuit for Edge Thomson scattering ITER diagnostics.
Fusion Engineering and Design,
Vol. 177,
Issue. ,
p.
113079.