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Monte Carlo Thermal Model of an Integrating Light Pipe for Rapid Thermal Processing

Published online by Cambridge University Press:  10 February 2011

J. C. Thomas  and
D. P. Dewitt
J. C. Thomas
Affiliation:
Ball Aerospace and Technologies Corporation, Broomfield CO 80021
D. P. Dewitt
Affiliation:
School of Mechanical Engineering, Purdue University, West Lafayette IN 47907-1288
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Abstract

A Monte Carlo model is developed to simulate transient wafer heating as a function of system parameters in a kaleidoscope- or integrating light-pipe type cavity with square cross-section. Trends in wafer temperature uniformity are examined as a function of length-to-width ratio, cavity width, and the number of heating lamps. The effect on temperature determination by a radiometer placed in the bottom end wall of the cavity is simulated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 429: Symposium N – Rapid Thermal and Integrated Processing V , 1996 , 37
Copyright
Copyright © Materials Research Society 1996

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