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Monte Carlo Simulation of Optical Temperature Sensors in RTP Systems

Published online by Cambridge University Press:  15 February 2011

J. Vernon Cole ,
Karson L. Knutson ,
Anthony T. Fiory  and
Klavs F. Jensen
J. Vernon Cole
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
Karson L. Knutson
Affiliation:
AG Associates, 1325 Borregas Avenue, Sunnyvale, CA 94089
Anthony T. Fiory
Affiliation:
AT&T Bell Laboratories, 600 Mountain Avenue, Murray Hill, NJ 07974
Klavs F. Jensen
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
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Abstract

We present simulation and experimental results for determining the distribution of radiation throughout an RTP system and evaluating the design of optical temperature sensors. The simulations are performed with a general purpose, three dimensional Monte Carlo method. The simulation models internal reflection, absorption, and transmission within participating media explicitly, and includes wavelength, temperature, and material dependent properties. Simulation results are compared to measurements of the lamp intensity profile within the lamphouse and at possible sensor locations. Simulations are used to examine the effect of several optical probe designs. The predicted responses of potential sensor designs resulting from these studies are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 387: Symposium P – Rapid Thermal and Integrated Processing IV , 1995 , 143
Copyright
Copyright © Materials Research Society 1995

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References

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