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Molecular Hydrogen in Hot-Wire Hydrogenated Amorphous Silicon
Published online by Cambridge University Press: 10 February 2011
Abstract
We have studied the elastic properties of hydrogenated amorphous silicon (a-Si:H) prepared by hot wire chemical-vapor deposition (HWCVD). With 1 at.% H, this material has been found to be the only amorphous solid which has a low-temperature internal friction more than two orders of magnitude smaller than all other amorphous solids studied to date, as reported recently. As the hydrogen concentration increases above 1 at.%, a broad relaxation peak in internal friction around 5 K is observed. Even more striking is an extremely narrow peak in internal friction accompanied by a discontinuous change in the sound velocity at 13.8 K, which coincides with the triple point temperature of molecular hydrogen. Evidences are provided to show that this anomaly is caused by bulk molecular hydrogen which undergoes a liquid-solid phase transition. This is the first observation for the existence of bulk H2 in HWCVD a-Si:H.
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- Copyright © Materials Research Society 1998
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