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Molecular Dynamics Simulation of Sputtering with Mmany-Body Interactions

Published online by Cambridge University Press:  26 February 2011

Davy Y. Lo ,
Tom A. Tombrello ,
Mark H. Shapiro  and
Don E. Harrison Jr.
Davy Y. Lo
Affiliation:
Division of Physics, Mathematics, and Astronomy, 200-36 California Institute of Technology, Pasadena, CA 91125
Tom A. Tombrello
Affiliation:
Division of Physics, Mathematics, and Astronomy, 200-36 California Institute of Technology, Pasadena, CA 91125
Mark H. Shapiro
Affiliation:
Division of Physics, Mathematics, and Astronomy, 200-36 California Institute of Technology, Pasadena, CA 91125
Don E. Harrison Jr.
Affiliation:
Department of Physics, US Naval Postgraduate School, Monterey, CA 93940
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Abstract

Many-body forces obtained by the Embedded-Atom Method (EAM) [41 are incorporated into the description of low energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardments of small, single crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {111}) by 5 keV Ar+ ions have been simulated. The results are compared to simulations using purely pair-wise additive interactions. Significant differences in the spectra of ejected atoms are found.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 145
Copyright
Copyright © Materials Research Society 1988

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References

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