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Molecular Beam Epitaxy Growth of High Mobility Compound Semiconductor Devices for Integration with Si CMOS

Published online by Cambridge University Press:  31 January 2011

Dmitri Lubyshev
Affiliation:
[email protected], IQE, Inc., Bethlehem, Pennsylvania, United States
Joel M. Fastenau
Affiliation:
[email protected], IQE, Inc., Bethlehem, Pennsylvania, United States
Ying Wu
Affiliation:
[email protected], IQE, Inc., Bethlehem, Pennsylvania, United States
Andrew Synder
Affiliation:
[email protected], IQE, Inc., Bethlehem, Pennsylvania, United States
Amy W. K. Liu
Affiliation:
[email protected], IQE, Inc., Bethlehem, Pennsylvania, United States
Mayank T. Bulsara
Affiliation:
[email protected], Massachusetts Institute of Technology, Department of Materials Science and Engineering, Cambridge, Massachusetts, United States
Eugene A. Fitzgerald
Affiliation:
[email protected], Massachusetts Institute of Technology, Department of Materials Science and Engineering, Cambridge, Massachusetts, United States
Miguel Urteaga
Affiliation:
[email protected], Teledyne Scientific Company, Thousand Oaks, California, United States
Wonill Ha
Affiliation:
[email protected], Teledyne Scientific Company, Thousand Oaks, California, United States
Joshua Bergman
Affiliation:
[email protected], Teledyne Scientific Company, Thousand Oaks, California, United States
M. J. Choe
Affiliation:
[email protected], Teledyne Scientific Company, Thousand Oaks, California, United States
Bobby Brar
Affiliation:
[email protected], Teledyne Scientific Company, Thousand Oaks, California, United States
William E. Hoke
Affiliation:
[email protected], Raytheon Integrated Defense Systems, Andover, Massachusetts, United States
Jeffrey R. LaRoche
Affiliation:
[email protected], Raytheon Integrated Defense Systems, Andover, Massachusetts, United States
Abbas Torabi
Affiliation:
[email protected], Raytheon Integrated Defense Systems, Andover, Massachusetts, United States
Thomas E. Kazior
Affiliation:
[email protected], Raytheon Integrated Defense Systems, Andover, Massachusetts, United States
David Smith
Affiliation:
[email protected], Raytheon Systems Ltd., Glenrothes, United Kingdom
David Clark
Affiliation:
[email protected], Raytheon Systems Ltd., Glenrothes, United Kingdom
Robin F. Thompson
Affiliation:
[email protected], Raytheon Systems Ltd., Glenrothes, United Kingdom
Charlotte Drazek
Affiliation:
[email protected], SOITEC, Parc Technologique des Fontaines, Bernin, France
Nicolas Daval
Affiliation:
[email protected], SOITEC, Parc Technologique des Fontaines, Bernin, France
Lamine Benaissa
Affiliation:
[email protected], CEA-LETI, MINATEC, Grenoble, France
Emmanuel Augendre
Affiliation:
[email protected], CEA-LETI, MINATEC, Grenoble, France
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Abstract

We report on a direct epitaxial growth approach for the heterogeneous integration of high speed III-V devices with Si CMOS logic on a common Si substrate. InP-based heterojunction bipolar transistor (HBTs) structures were successfully grown on patterned Si-on-Lattice-Engineered-Substrate (SOLES) substrates using molecular beam epitaxy. DC and RF performance similar to those grown on lattice-matched InP were achieved in growth windows as small as 15×15μm2. This truly planar approach allows tight device placement with InP-HBTs to Si CMOS transistors separation as small as 2.5 μm, and the use of standard wafer level multilayer interconnects. A high speed, low power dissipation differential amplifier was designed and fabricated, demonstrating the feasibility of using this approach for high performance mixed signal circuits such as ADCs and DACs.

Type
Research Article
Copyright
Copyright © Materials Research Society 2010

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References

1 Patterson, P. R. and Elliott, K., 214th Electrochemical Society Meeting, Honolulu, HI, Oct 12–17, 2008 (E11-2218).Google Scholar
2 Nam, P., Zhou, J., Chang-Chien, P., Tornquist, K., Scott, D., Oyama, B., Thai, K., Phan, W., Sandhu, R., Gutierrez, A., Wang, J., Barsky, M., and Oki, A., 214th Electrochemical Society Meeting, Honolulu, HI, Oct 12–17, 2008 (E12-2245).Google Scholar
3 Herrick, K. J., Kazior, T. E., LaRoche, J., Liu, A. W. K., Lubyshev, D., Fastenau, J. M., Urteaga, M., Ha, W., Bergman, J., Brar, B., Bulsara, M. T., Fitzgerald, E. A., Clark, D., Smith, D., Thompson, R. F., Daval, N., and Celler, G. K., 214th Electrochemical Society Meeting, Honolulu, HI, Oct 12–17, 2008 (E11 2219).Google Scholar
4 Lubyshev, D., Fastenau, J. M., Liu, W. K., Wu, Y., Bulsara, M. T., Fitzgerald, E. A., and Hoke, W. E., J. Vac. Sci. Technol. B, 26, 1115 (2008).10.1116/1.2884749Google Scholar
5 Liu, W. K., Lubyshev, D., Fastenau, J. M., Wu, Y., Bulsara, M. T., Fitzgerald, E. A., Urteaga, M., Ha, W., Bergman, J., Brar, B., Hoke, W. E., LaRoche, J. R., Herrick, K. J., Kazior, T. E., Clark, D., Smith, D., Thompson, R. F., Drazek, C., and Daval, N., J. Crystal Growth (2009).Google Scholar
6 Maleville, C. and Mazuré, C., Solid State Electron. 48 (2004) 1055.10.1016/j.sse.2003.12.029Google Scholar
7Smart-CutTM is a registered trademark of Soitec.Google Scholar
8 Sieg, R. M., Ringel, S. A., Ting, S. M., Fitzgerald, E. A., and Sacks, R. N., J. Electron. Mater. 27, 900 (1998).10.1007/s11664-998-0116-1Google Scholar
9 Ting, S. M. and Fitzgerald, E. A., J. Appl. Phys. 87, 2618 (2000).10.1063/1.372227Google Scholar
10 Lubyshev, D. I., Fastenau, J. M., Fang, X.-M., Wu, Y., Doss, C., Snyder, A., Liu, W. K., Lamb, M. S. M., Bals, S., and Song, C., J. Vac. Sci. Technol. B, 22, 1565 (2004).10.1116/1.1691412Google Scholar
11 Dahlström, M., Fang, X.-M., Lubyshev, D., Urteaga, M., Krishnan, S., Parthasarathy, N., Kim, Y. M., Wu, Y., Fastenau, J. M., Liu, W. K., and Rodwell, M. J. W., IEEE Electron Device Letts. 24, 433 (2003).10.1109/LED.2003.815009Google Scholar
12 Kazior, T. E., LaRoche, J. R., Lubyshev, D., Fastenau, J. M., Liu, W. K., Urteaga, M., Ha, W., Bergman, J., Brar, B., Bulsara, M. T., Fitzgerald, E. A., Smith, D., Clark, D., Thompson, R. F., Drazek, C., and Daval, N., 21st InP and Related Materials Conference, Newport Beach, CA, May 10–14, 2009.Google Scholar