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Modified Preston Equation- Revisited

Published online by Cambridge University Press:  10 February 2011

S Ramarajan  and
S.V. Babu
S Ramarajan
Affiliation:
Center for Advanced Materials Processing, Clarkson University, Potsdam, NY-13699.
S.V. Babu
Affiliation:
Center for Advanced Materials Processing, Clarkson University, Potsdam, NY-13699.
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Abstract

The effect of pressure and velocity on the polish rates of copper was determined in DI water and in the presence of ferric nitrate, H202/glycine, and NH4OH with alumina particles as the abrasives. The polish rate shows a stronger dependence on velocity than that predicted by the Preston equation in the case of ferric nitrate, a highly reactive chemical. The velocity dependence is weaker for the other two less reactive chemicals, and is the same as that predicted by Preston equation for DI water. Our earlier empirical model, R = KPV + BV + Rc, where K, B, and Rc are constants, describes all the polish rate data satisfactorily.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 566: Symposium P – Chemical-Mechanical Poilshing-Fundamentals and Challenges , 1999 , 149
Copyright
Copyright © Materials Research Society 2000

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References

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