Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-23T12:10:01.805Z Has data issue: false hasContentIssue false
  • English
  • Français

Modification of Conductivity and of Mechanical Properties of Electroactive Polymer (EAP) Thin Films by Titanium Ion Implantation

Published online by Cambridge University Press:  01 February 2011

Muhamed Niklaus ,
Samuel Rosset ,
Massoud Dadras ,
Philippe Dubois  and
Herbert R. Shea
Muhamed Niklaus
Affiliation:
[email protected], EPFL, LMTS, Rue Jaquet-Droz 1, Case postale 526, Neuchâtel, 2002, Switzerland, +41 32 720 51 82, +41 32 720 57 54
Samuel Rosset
Affiliation:
[email protected], EPFL, LMTS, Neuchâtel, 2002, Switzerland
Massoud Dadras
Affiliation:
[email protected], University of Neuchâtel, IMT, Neuchâtel, 2002, Switzerland
Philippe Dubois
Affiliation:
[email protected], EPFL, LMTS, Neuchâtel, 2002, Switzerland
Herbert R. Shea
Affiliation:
[email protected], EPFL, LMTS, Neuchâtel, 2002, Switzerland
Get access

Abstract

We present a study of the influence on Young's modulus, stress and electrical conductivity of poly-dimethylsiloxane membranes implanted with titanium ions at energies from 5 to 35 keV, with doses up to 8×1016 ions/cm2. The motivation for this study was to find the optimum implantation conditions to create electrodes for microfabricated dielectric electroactive polymer actuators, which must combine low resistivity with low stiffness. Two implantation techniques are used, Filtered Cathodic Vacuum Arc (FCVA) and the more conventional Low Energy broad beam Implanter (LEI). Of the two, it is found that the FCVA implanter is much better suited to create compliant electrodes.

Keywords

ion-implantationpolymerelastic properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD03-10
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Ashley, S., Scientific American 289(4), 52–59 (2003).Google Scholar
[2] Dubois, P., Rosset, S., Koster, S., Stauffer, J., Mikhaïlov, S., Dadras, M., Rooij, N.-F. de and Shea, H. R., Sensors and Actuators A: Physical 130–131, 147–154 (2006).Google Scholar
[3] Rosset, S., Niklaus, M., Dubois, P., Dadras, M., and Shea, H. R. in Electroactive Polymer Actuators and Devices (EAPAD), (Proceedings of the SPIE 6524, San Diego, CA, USA, May 2007), pp. 652410.Google Scholar
[4] Rosset, S., Niklaus, M., Dubois, P., Shea, H. R., Submitted to Sensors and Actuators, (September 2007).Google Scholar
[5] Ziegler, J. F. and Biersack, J. P., SRIM - The Stopping and Range of Ions in Matter, software at: http://www.srim.org/.Google Scholar
[6] Simanek, E., Solid State Communications 40, (Pergamon Press Ltd. 1981) pp. 1021–1023.Google Scholar
[7] Kirkpatrick, Scott, Solid State Communications 12, 1279–1283 (1973); PHYSICAL REVIEW B 74, 174201 (2006).Google Scholar