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Modelling surface growth in IBAD with rate equations
Published online by Cambridge University Press: 17 March 2011
Abstract
We develop a rate-equation model for surface growth in ion beam assisted deposition. In terms of the rate coefficients the model describes how island detachment and breakup, adatom diffusion and interlayer transitions of adatoms affect the growth. We identify parameter values corresponding to different modes of growth and discuss our results and ways to improve the model.
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- Research Article
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- Copyright © Materials Research Society 2001
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