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Modeling The Evolution of Ellipsometric Data During The Thermally Induced Pt-Silicide Formation: Activation Energies and Prefactors

Published online by Cambridge University Press:  10 February 2011

L. Ley ,
T. Stark ,
M. Hundhausen  and
H. Gruenleitner
L. Ley
Affiliation:
Institute of Technical Physics, University of Erlangen, Germany
T. Stark
Affiliation:
Institute of Technical Physics, University of Erlangen, Germany
M. Hundhausen
Affiliation:
Institute of Technical Physics, University of Erlangen, Germany
H. Gruenleitner
Affiliation:
Institute for Applied Physics, University of Erlangen, Germany
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Abstract

The formation of Pt silicide (PtSi) by the thermally activated reaction of a 23 nm Pt layer on Si was monitored in situ by ellipsometry. Characteristic changes in the ellipsometric angles as a function of temperature signal the approach of two reaction fronts to the surface: one belonging to the Pt/Pt2Si and the other to the Pt2Si/PtSi interface. An analysis of the evolution of the ellipsometric angles as a function of temperature for different heating rates allows the accurate determination of the average activation energies of the two reactions. From a modeling of the optical data in terms of a specific reaction model further kinetic parameters such as the reaction rate constants and the actual distribution of activation energies have been deduced.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 569: Symposium U – In Situ Process Diagnostics and Modelling , 1999 , 145
Copyright
Copyright © Materials Research Society 1999

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References

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