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Microwave CVD of Diamond Using Methanol-Rare Gas Mixtures

Published online by Cambridge University Press:  26 February 2011

M. Buck ,
T. J. chuang ,
J. H Kaufman  and
H. Seki
M. Buck
Affiliation:
IBM Research Division, Almaden Research Center, 650 Hlarry Road, San Jose, California 951!20-6099
T. J. chuang
Affiliation:
IBM Research Division, Almaden Research Center, 650 Hlarry Road, San Jose, California 951!20-6099
J. H Kaufman
Affiliation:
IBM Research Division, Almaden Research Center, 650 Hlarry Road, San Jose, California 951!20-6099
H. Seki
Affiliation:
IBM Research Division, Almaden Research Center, 650 Hlarry Road, San Jose, California 951!20-6099
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Abstract

The deposition of diamond from a reactive vapor phase has been dominated by the use of very dilute gas mixtures of hydrocarbon molecules, usually methane, in hydrogen. Recently there have been reports using nitrogen and oxygen containing simple organics such as amines and alcohols which seem promising. The role of atoms other than hydrogen is still not very clear. There is need for more experimental data to further our understanding in this regard. Here we give a preliminary report on our investigation of deposition from methanol-rare gas mixtures using a small microwave reactor. An important result is that good diamond can be deposited from methanol without addition of hydrogen gas and the quality of the crystallites can be influenced by Ar in the plasma.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 162: Symposium F – Diamond, Silicon Carbide and Related Wide Bandgap Semiconductors , 1989 , 97
Copyright
Copyright © Materials Research Society 1990

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References

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