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Micro-Structuring of Metal Films by Localized Single-Pulse Laser Irradiation

Published online by Cambridge University Press:  22 August 2011

Chandra Prakash R. Gaddam ,
Joseph P. Moening ,
Nanke Jiang  and
Daniel G. Georgiev
Chandra Prakash R. Gaddam
Affiliation:
Department of Electrical Engineering and Computer Science, University of Toledo, Toledo, OH 43606, U.S.A.
Joseph P. Moening
Affiliation:
Department of Electrical Engineering, Lake Superior State University, Sault Ste. Marie, MI 49783, U.S.A.
Nanke Jiang
Affiliation:
Department of Electrical Engineering and Computer Science, University of Toledo, Toledo, OH 43606, U.S.A.
Daniel G. Georgiev
Affiliation:
Department of Electrical Engineering and Computer Science, University of Toledo, Toledo, OH 43606, U.S.A.
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Abstract

We present data on micrometer-scale localized single-pulse laser irradiation of Au, Cu, Al, or Ti films on borosilicate glass substrates. These metals represent a range of thermal properties, chemical reactivity levels, and relevance to specific applications. A mask projection technique employing a Q-switched Nd:YAG laser, emitting at its fourth harmonic of 266nm, was used to produce the irradiation spots in this work. The metal films, deposited by RF-sputtering, had thicknesses of several hundred nanometers. Sample irradiation was performed in either vacuum or ambient air, and the resulting microstructures were examined by electron microscopy. The results indicate that irradiation of Cu films can lead to the formation of bumps, sharp cones or protrusions. However, the controllability of these structures on Cu films is limited, compared to those formed on Au or Si. The results, upon irradiation of Ti films, are limited to melting and surface roughening or ablation openings, regardless of the conditions of irradiation, film thickness, substrate or ambient gas. The modifications that occur within Al films are reproducible, but limited in shape and size.

Keywords

laser annealingnanoscalescanning electron microscopy (SEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1365: Symposium TT – Laser-Material Interactions at Micro/Nanoscales , 2011 , mrss11-1365-tt09-11
Copyright
Copyright © Materials Research Society 2011

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References

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