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Microstructures of Amorphic Diamond™ Films Deposited by Laser-Ablation

Published online by Cambridge University Press:  10 February 2011

Hyunchul Sohn ,
Kannan Krishnan  and
Richard Fink
Hyunchul Sohn
Affiliation:
Materials Science Division, Lawrence Berkeley Laboratory, Berkeley, California
Kannan Krishnan
Affiliation:
Materials Science Division, Lawrence Berkeley Laboratory, Berkeley, California
Richard Fink
Affiliation:
SI Diamond Technology, Austin, Texas
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Abstract

Microstructures of Amorphic Diamond™ films deposited by laser ablation method were investigated using transmission electron microscopy. The AD films matrix was homogeneous with a sp3-type bonding fraction of 40%∼45% confirmed by electron energy-loss spectroscopy. The sp3 bonding fraction decreased monotonically with increasing annealing temperature. The main inhomogeneity in Amorphic Diamond™ was observed to be particulates of high density (>105/cm2) distributed through the depth of the film. Particulate size ranged from ∼10nm to a few μm and most of them were identified to be graphite. Large particles (>0.5μm) were agglomerates of smaller graphite crystallites. Possible mechanisms for cold field emission are discussed based on the microstructures observed in these AD films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 455
Copyright
Copyright © Materials Research Society 1996

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References

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