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Microstructure and Stability Comparison of Nanometer Period W/C, Wc/C, and Ru/C Multilayer Structures

Published online by Cambridge University Press:  21 February 2011

Tai D. Nguyen ,
Ronald Gronsky  and
Jeffrey B. Kortright
Tai D. Nguyen
Affiliation:
Center for X-Ray Optics, Accelerator and Fusion Research Division. National Center for Electron Microscopy, Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory Department of Materials Science and Mineral Engineering, University of California, Berkeley, CA. 94720.
Ronald Gronsky
Affiliation:
National Center for Electron Microscopy, Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory Department of Materials Science and Mineral Engineering, University of California, Berkeley, CA. 94720.
Jeffrey B. Kortright
Affiliation:
Center for X-Ray Optics, Accelerator and Fusion Research Division.
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Abstract

Multilayer structures of W/C, WC/C, and Ru/C, of various periods were prepared and studied by high-resolution transmission electron microscopy. Comparison of the phases in the layered structures is made for as-prepared and annealed samples. Both as-prepared and annealed WC/C multilayers are predominantly amorphous, while the phases in the W/C depend on the periods. The 2 nm period W/C multilayer remains amorphous after annealing, and the longer periods recrystallize to form W2C. The layered microstructures of W/C and WC/C are stable on annealing at all periods, while the amorphous Ru-rich layers in the 2 nm period Ru/C multilayer agglomerate upon annealing to form elemental hexagonal Ru crystallites. Larger period Ru/C multilayers show stable layered structures, and indicate hexagonal Ru in the Ru-rich layers. X-ray measurements show that the multilayer periods expand on annealing for all metal-carbon multilayers studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 95
Copyright
Copyright © Materials Research Society 1990

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