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Microstructure and Mechanical Properties of Nanolayered TiN/Cu Thin Films

Published online by Cambridge University Press:  10 February 2011

Y.Y. Tse ,
G. Abadias ,
A. Michel ,
C. Tromas  and
M. Jaouen
Y.Y. Tse
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS, Université de Poitiers, SP2MI, Téléport 2, BP 30179, 86962 Futuroscope-Chasseneuil cedex, France
G. Abadias
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS, Université de Poitiers, SP2MI, Téléport 2, BP 30179, 86962 Futuroscope-Chasseneuil cedex, France
A. Michel
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS, Université de Poitiers, SP2MI, Téléport 2, BP 30179, 86962 Futuroscope-Chasseneuil cedex, France
C. Tromas
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS, Université de Poitiers, SP2MI, Téléport 2, BP 30179, 86962 Futuroscope-Chasseneuil cedex, France
M. Jaouen
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS, Université de Poitiers, SP2MI, Téléport 2, BP 30179, 86962 Futuroscope-Chasseneuil cedex, France
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Abstract

Structural and mechanical properties of nanoscale TiN/Cu multilayers grown by dual ion beam sputtering with bilayer periods (A) ranging from 2.5 to 50 nm were studied. Both low-angle and high-angle X-ray diffraction (XRD) experiments have been employed to globally characterize the multilayers structure. The microstructure of the multilayers has been scrutinized by high resolution transmission electron microscopy (HRTEM). The effects of interface and bilayer thickness on hardness were investigated by depth-sensing nanoindentation technique. A small hardness increase with decreasing periodicity of the multilayers has been observed. The relationship between the hc/T ratio (hc is the contact depth and T is the total film thickness) and the hardness is established. The correlation between the microstructure and hardness is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 778: Symposium U – Mechanical Properties Derived from Nanostructuring Materials , 2003 , U6.8
Copyright
Copyright © Materials Research Society 2002

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