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Microstructure and Electrical Properties of Zinc Films on InP
Published online by Cambridge University Press: 15 February 2011
Abstract
The interactions between thin films of Zn and (100)InP were analysed with secondary ion mass spectrometry, X-ray diffraction and transmission electron microscopy. Zn was found to penetrate the native oxide on InP surface during deposition, and to form an ohmic contact when deposited on n-type InP. Under heat treatment Zn protrudes into InP, and beneath Zn/InP interface a tetragonal Zn3P2 phase lattice matched to InP grows.
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- Copyright © Materials Research Society 1996