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Microstructural Evolution of TiO2 Sol-Gel Thin Films

Published online by Cambridge University Press:  28 February 2011

J.L. Keddie  and
E.P. Giannelis
J.L. Keddie
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
E.P. Giannelis
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853.
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Abstract

Backscattering spectrometry has been used to determine the density of TiO2 sol-gel films. The density of the as-deposited films relative to that of anatase varies slightly with respect to deposition conditions and is approximately 0.5. Annealing at temperatures as high as 750°C increases the relative density to 0.7 with concomitant decreases in the O:Ti ratio and H content but it does not result in complete densification. Film densities are consistently higher for films annealed under dynamic vacuum compared to those in air.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 425
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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