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Microstructural Evolution of Sol-Gel Derived PZT Thin Films

Published online by Cambridge University Press:  25 February 2011

Cheng-Chen Hsueh  and
Martha L. Mecartney
Cheng-Chen Hsueh
Affiliation:
National Semiconductor Corporation, Fairchild Research Center, Santa Clara, CA 95052-8090
Martha L. Mecartney
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
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Abstract

Transmission electron microscopy (TEM) was used to investigate the microstructural evolution of sol-gel derived ferroelectric PZT films. Aggregates of perovskite crystals nucleated and grew out of a pyrochlore matrix at 550°C. A dense, single-phase perovskite PZT film was obtained by fast firing the film at 650°C for 30 minutes. The grain size of this film was approximately 0.2-0.4 μm. Hot-stage TEM observed disappearance of ferroelectric domains as the temperature approaching 325°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 451
Copyright
Copyright © Materials Research Society 1992

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