Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-25T18:00:28.966Z Has data issue: false hasContentIssue false
  • English
  • Français

Microstructural characterization of porous thin films

Published online by Cambridge University Press:  11 February 2011

B. Djurfors ,
M.J. Brett  and
D.G. Ivey
B. Djurfors
Affiliation:
nDepartment of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2G6.
M.J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2V4.
D.G. Ivey
Affiliation:
nDepartment of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2G6.
Get access

Abstract

A preliminary TEM investigation of porous films fabricated by glancing angle deposition has shown the importance of surface diffusion and crystal structure in determining the final microstructure of the film. Although the process variables are extremely important in defining the morphology of the film, their effects are limited in terms of final microstructure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 749: Symposium W – Morphological and Compositional Evolution of Thin Films , 2002 , W5.4
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Robbie, K., Friedrich, L.J., Dew, S.K., Smy, T., and Brett, M.J., J. Vac. Sci. Technol. A., 13(3), 1032(1995).Google Scholar
2. Robbie, K., Brett, M.J., and Lakhtakia, A., J. Vac. Sci. Technol. A., 13(6), 2991(1995).Google Scholar
3. Robbie, K. and Brett, M.J., J. Vac. Sci. and Technol. A., 15(3), 1460(1997).Google Scholar
4. Robbie, K., Sit, J.C., and Brett, M.J., J. Vac. Sci. and Technol. A. 16(3), 1115(1998).Google Scholar
5. Malac, M., Egerton, R. F., Brett, M.J., and Dick, B., J. Vac. Sci. and Technol. B. 17(6), 2671(1999).Google Scholar
6. Malac, M., PhD. Thesis, Chapter 5, University of Alberta, 2000.Google Scholar
7. Malac, M., PhD. Thesis, Chapter 6, University of Alberta, 2000.Google Scholar