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Microstructural and Electrical Characterization of Barium Strontium Titanatebased Solid Solution Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition

Published online by Cambridge University Press:  01 February 2011

Costas G. Fountzoulas ,
Daniel M. Potrepka  and
Steven C. Tidrow
Costas G. Fountzoulas
Affiliation:
Weapons Materials Research Directorate, Army Research Laboratory, Aberdeen Proving Ground, MD 21005-5069, U.S.A.
Daniel M. Potrepka
Affiliation:
Sensors and Electron devices Directorate, Army Research Laboratory, Adelphi, MD 20783-1197, U.S.A.
Steven C. Tidrow
Affiliation:
Sensors and Electron devices Directorate, Army Research Laboratory, Adelphi, MD 20783-1197, U.S.A.
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Abstract

Ferroelectrics are multicomponent materials with a wealth of interesting and useful properties, such as piezoelectricity. The dielectric constant of the BSTO ferroelectrics can be changed by applying an electric field. Variable dielectric constant results in a change in phase velocity in the device allowing it to be tuned in real time for a particular application. The microstructure of the film influences the electronic properties which in turn influences the performance of the film. Ba0.6Sr0.4Ti1-y(A 3+, B5+)yO3 thin films, of nominal thickness of 0.65 μm, were synthesized initially at substrate temperatures of 400°C, and subsequently annealed to 750°C, on LaAlO3 (100) substrates, previously coated with LaSrCoO conductive buffer layer, using the pulsed laser deposition technique. The microstructural and physical characteristics of the postannealed thin films have been studied using x-ray diffraction, scanning electron microscopy, and nano indentation and are reported. Results of capacitance measurements are used to obtain dielectric constant and tunability in the paraelectric (T>Tc) regime.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 720: Symposium H – Materials Issues for Tunable RF and Microwave Devices III , 2002 , H2.4
Copyright
Copyright © Materials Research Society 2002

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