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Microsphere-assisted Fabrication of Ultra-high Aspect-ratio PDMS Micropillars for Bio-inspired Acoustic Sensing

Published online by Cambridge University Press:  24 February 2015

Jungwook Paek  and
Jaeyoun Kim
Jungwook Paek
Affiliation:
Department of Electrical and Computer Engineering, Iowa State University, Ames, Iowa, USA
Jaeyoun Kim
Affiliation:
Department of Electrical and Computer Engineering, Iowa State University, Ames, Iowa, USA
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Abstract

We developed a new soft-lithographic fabrication technique which enables the realization of high aspect-ratio PDMS micropillars. The key enabling factor is the adoption of the direct drawing technique incorporated with the in situ heating for simultaneous hardening and solidification of the PDMS micropillars. In addition, our technique allows self-aligned installation of highly reflective microspheres at the tips of the micropillars. Using the transparent PDMS micropillar as a flexible waveguide and the microsphere as a self-aligned reflector, we transformed the microsphere-tipped PDMS micropillars into all optically interrogated acoustic sensors inspired by the cricket’s filiform hairs and successfully demonstrated the sensing capability.

Keywords

microstructurebiomimetic (assembly)sensor
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1749: Symposium JJ – 3D Mesoscale Architectures—Synthesis, Assembly, Properties and Applications , 2015 , mrsf14-1749-jj01-08
Copyright
Copyright © Materials Research Society 2015 

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References

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