Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-27T01:32:03.274Z Has data issue: false hasContentIssue false
  • English
  • Français

Microscratch Analysis of The Adhesion Failure on Oxide Thin Films With Different Thickness

Published online by Cambridge University Press:  15 February 2011

C. R. Ottermann ,
K. Bange ,
A. Braband ,
H. Haefke  and
W. Gutmannsbauer
C. R. Ottermann
Affiliation:
SCHOTT GLASWERKE, R&D, P.O. Box 24 80, D-55014 Mainz, Germany
K. Bange
Affiliation:
SCHOTT GLASWERKE, R&D, P.O. Box 24 80, D-55014 Mainz, Germany
A. Braband
Affiliation:
SCHOTT GLASWERKE, R&D, P.O. Box 24 80, D-55014 Mainz, Germany
H. Haefke
Affiliation:
CSEM Swiss Centre for Electronics and Microtechnology, Inc., P.O. Box 41, CH-2007 Neuchâtel, Switzerland
W. Gutmannsbauer
Affiliation:
University of Basel, Institute of Physics, Klingelbergstrasse 82, CH-4056 Basel, Switzerland
Get access

Abstract

Adhesion failures of Ti2 and Ta2O5 thin films deposited by reactive evaporation (RE), reactive ion plating (IP) and plasma impulse chemical vapour deposition (PICVD) on fused silica, AF 45, TEMPAX and soda-lime glass substrates are investigated by means of a micro-scratch tester. The oxide films possess thickness between 60 and 500 nm and show different mass densities depending on the deposition conditions. Scratch testing exhibits well pronounced detachment for thicker films on hard substrates. The clearance of the scratch signal is reduced with decreasing layer thickness or for softer substrate materials. The test results are also influenced by the various substrates and different chemical and mechanical properties of the films due to the alternate deposition techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 109
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Steinmann, P.A., Tardy, Y., and Hintermann, H.E., Thin Solid Films 154, 333–349 (1987)Google Scholar
[2] Burnett, P.J. and Rickerby, D.S., Thin Solid Films 154, 403–416 (1987)Google Scholar
[3] Bull, S.J. and Rickerby, D.S., Surf. Coat. Technol. 42, 149–164 (1990)Google Scholar
[4] Bull, S.J., Surf. Coat. Technol. 50, 25–32 (1991)Google Scholar
[5] Mittal, K.L. (ed.), Adhesion Measurement of Films and Coatings (VSP, Utrecht, The Netherlands, 1995)Google Scholar
[6] Perry, A.J. and Pulker, H.K., Thin Solid Fims 124, 323–333 (1985)Google Scholar
[7] Kimura, F., Baba, S., Kikuchi, A., and Kinbara, A., Thin Solid Films 181, 435–441 (1989)Google Scholar
[8] Ottermann, C.R. et al., Mat. Res. Soc. Symp. Proc. Vol.308, 627 (1993); Vol. 356, 839 (1995)Google Scholar
[9] Bange, K. et al., BMFT-Abschlußbericht FKZ 13 N 5476/6 (1991)Google Scholar
[10] Ottermann, C.R. et al., Mat. Res. Soc. Symp. Proc. 308, 69 (1993); Vol. 356, 187 (1995)Google Scholar
[11] Ottermann, C.R., Kuschnereit, R., Anderson, O., Hess, P., and Bange, K., Mat. Res. Soc. Symp. Proc, in preparationGoogle Scholar
[12] Ottermann, C.R:, Baker, S.P., Laube, M., Bange, K., and Rauch, F., Mat. Res. Soc. Symp. Proc, in preparationGoogle Scholar
[13] Ottermann, C.R. et al., in preparationGoogle Scholar
[14] Julia-Schmutz, C. and Hintermann, H.E., Surf. Coat. Techn. 48, 1–6 (1991)Google Scholar
[15] Laursen, T.A. and Simo, J.C., J. Mater. Res. 7, 618 (1992)Google Scholar