Hostname: page-component-cd9895bd7-lnqnp Total loading time: 0 Render date: 2024-12-27T01:54:58.194Z Has data issue: false hasContentIssue false
  • English
  • Français

Microporous Amorphous Superlattices

Published online by Cambridge University Press:  25 February 2011

H. W. Deckman ,
B. Abeles ,
J. H. Dunsmuir ,
C. B. Roxlo  and
T. Tiedje
H. W. Deckman
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
B. Abeles
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
J. H. Dunsmuir
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
C. B. Roxlo
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
T. Tiedje
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
Get access

Abstract

Lithographic fabrication techniques have been extended to the molecular dimension by using the layer pattern in deposited amorphous superlattices as an etching template for the creation of slot structures. Fabrication considerations are discussed for the formation of 10–50Å slots structures suitable for studying shape selective chemistry with fluoresence spectroscopy.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 76: Symposium C – Science and Technology of Microfabrication , 1986 , 49
Copyright
Copyright © Materials Research Society 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Douglas, K., Clark, N. A., Rothschild, K. J., App. Phys. Lett. 48, 676 (1986).Google Scholar
2. Roxlo, C. B., Deckman, H. W. and Abeles, B., Phys. Rev. Lett. 57, 2465 (1986).Google Scholar
3. Deckman, H. W., Dunsmuir, J., Abeles, B. and Roxlo, C. B., App. Phys. Lett. (to be published).Google Scholar
4. Roxlo, C. B. et al (this proceedings).Google Scholar
5. Abeles, B. and Tiedje, T., Phys. Rev. Lett. 51, 2003 (1983).Google Scholar
6. Deckman, H. W., Dunsmuir, J. and Abeles, B., Appl. Phys. Lett. 46, 171 (1986).Google Scholar
7. Yang, L., Abeles, B. and Persans, P., App. Appl. Phys. Lett [in press].Google Scholar
8. Persans, P. D., Ruppert, A. F., Abeles, B., Tiedje, T. and Stasiewski, H., Phys. Rev. B32, 5558 (1986).Google Scholar
9. Abeles, B., Tiedje, T., Liang, K. S., Deckman, H. W., Stasiewski, H. C., Scanlon, J. C. and Eisenberger, P. M., J. Non-Cryst. Solids 66, 351 (1984).CrossRefGoogle Scholar
10. Deckman, H. W. and Dunsmuir, J. H., Appl. Phys Lett. 41, 377 (1982).Google Scholar
11. Beckman, H. W., MRS Symposia Proceedings 38, 215 (1984).Google Scholar
12. Baxter, C. S. and Stobbs, W. M., Appl. Phys. Lett. 48, 1202 (1986).Google Scholar