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Micro Feature Pad Development and Its Performance in Chemical Mechanical Planarization
Published online by Cambridge University Press: 15 March 2011
Abstract
There are many elements affecting CMP performance such as the slurry, pad, process parameters and pad conditioning. Among these, the pad is considered to be one of the most important parts because of its deterioration during polishing. However, specific pad design techniques have not yet been fully investigated. In this paper, conventional polyurethane pad characteristics are investigated. A pad design based on this analysis is suggested. Prototype pads are fabricated using micro molding and are used in an experiment for examining the pad deterioration mechanism.
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- Copyright © Materials Research Society 2004