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Method and Instrumentation for Nondestructive Characterization of Surface Area and Pore Size Distribution of Thin Films in Their Deposited State
Published online by Cambridge University Press: 10 February 2011
Abstract
TPL has developed a method and instrumentation system for characterizing the surface area and pore size distribution of a thin-film or coating in its as-deposited state. Errors associated with destructive removal of the film are avoided and small sample sizes can be utilized with high-fidelity results.
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- Copyright © Materials Research Society 2000