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Metastable Pyrochlore Structures in Sol Gel Spin Coated Lead Titanate Thin Films on Silicon Substrate

Published online by Cambridge University Press:  15 February 2011

Jeon-Kook Lee ,
Hyung-Jin Jung  and
Chong-Hee Kim
Jeon-Kook Lee
Affiliation:
Div. Ceramics, Korea Institute of Science and Technology, Seoul 130-650, Korea
Hyung-Jin Jung
Affiliation:
Div. Ceramics, Korea Institute of Science and Technology, Seoul 130-650, Korea
Chong-Hee Kim
Affiliation:
Dept. Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Seoul 130-012, Korea
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Abstract

High quality lead titanate thin films were fabricated by spin coating on a silicon substrate. The resulting dried gel layers were uniform in thickness through 2 ' area, and polycrystalline perovskite structures developed almost crack free with a heat treatment above 500°C in films with thickness above 0.36μm.

Metastable pyrochlore structures were observed in films with thickness of 0.16,μm when heat treated at 500 and 600 °C. But these structure did not appear in films with thickness of 0.36μm.The thickness dependencein crystal structure of films was studied by varing the substrate condition and analyzing the interface between the.film and. substrate. In native oxide films on silicon substrates, amorphous dried gel layers were heterogeneously nucleated. Metastable cubic pyrochlore structure could be crystallized in amorphous native oxide (cubic property in random network structure).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 230: Symposium R – Phase Transformation Kinetics in Thin Films , 1991 , 307
Copyright
Copyright © Materials Research Society 1992

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