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Metallurgical Behavior of the Metal-IN-P Systems: Implications for the Design of Contacts to Inp

Published online by Cambridge University Press:  25 February 2011

Suzanne E. Mohney
Affiliation:
Materials Science Program, University of Wisconsin-Madison, 1509University Ave., Madison, WI 53706
Y. Austin Chang
Affiliation:
Materials Science and Engineering Department, University of Wisconsin-Madison, 1509University Ave., Madison, WI 53706
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Abstract

Phase equilibria in the M-In-P (M = transition metal) ternary systems is determined through a combination of thermodynamic calculation and experimentation. Palladium is identified as a particularly attractive metal for contacts to InP. One useful feature of this system for contact design is the occurance of PdχInP ternary phases. Additionally, Pdln is found to be in equilibrium with InP and is identified as a promising contact material to InP because of its high melting point, low resistivity, and favorable properties for processing. Progress in the development of Pdln-based contacts to InP is briefly discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Beyers, R., Kim, K. B. and Sinclair, R., J. Appl. Phys. 61, 2195 (1987).CrossRefGoogle Scholar
2. Sands, T., J. Metals 38, 31 (1986).Google Scholar
3. Tsai, C. T. and Williams, R. S., J. Mat. Res. 1, 820 (1986).Google Scholar
4. Andersson-Söderberg, M., J. Less-Common Met. 159, L13 (1990).CrossRefGoogle Scholar
5. Swenson, D. and Chang, Y. A., Mat. Sci. Eng. B 8, 225 (1991).CrossRefGoogle Scholar
6. Andersson-Söderberg, M., in Chemical Perspectives of Microelectronics II, edited by Interrante, L. V., Jensen, K. F., Dubois, L. H. and Gross, M. E. (Mat. Res. Soc. Proc. 204, Pittsburgh, PA 1990), p. 231.Google Scholar
7. Mohney, S. E. and Chang, Y. A., to appear in J. Mater. Res. (1992).Google Scholar
8. de Boer, F. R., Boom, R., Mattens, W. C. M., Miedema, A. R. and Niessen, A. K., Cohesion in Metals: Transition Metal Alloys, (North-Holland, Amsterdam, 1988).Google Scholar
9. Lin, C. F., Mohney, S. E. and Chang, Y. A. (unpublished).Google Scholar
10. Appelbaum, A., Feldman, L. C., Koszi, L. A., Thomas, P. M. and Barnes, P. A. (unpublished).Google Scholar
11. Mohney, S. E., Zhang, M. -X. and Chang, Y. A. (unpublished).Google Scholar
12. Katz, A., Weir, B. E., Chu, S. N. G., Thomas, P. M., Soler, M., Boone, T. and Dautremont-Smith, W. C., J. Appl. Phys. 67, 3872 (1990).CrossRefGoogle Scholar
13. Fatemi, N. S. and Weizer, V. G., J. Electron. Mat. 20, 875 (1991).CrossRefGoogle Scholar
14. Chen, W. X., Hsueh, S. C., Yu, P. K. L. and Lau, S. S., IEEE Electron Device Lett. 7, 471 (1986).CrossRefGoogle Scholar
15. Ivey, D. G., Jian, P., Wan, L., Bruce, R., Eicher, S. and Blaauw, C., J. Electron. Mat. 20, 237 (1990).CrossRefGoogle Scholar
16. Stremsdoerfer, G., Calais, C., Martin, J. R. and Clechet, P., J. Electrochem. Soc. 137, 835 (1990).CrossRefGoogle Scholar
17. El-Boragy, M. and Schubert, K., Z. Metallkde. 61, 579 (1970).Google Scholar
18. Caron-Popowich, R., Washburn, J., Sands, T. and Kaplan, A. S., J. Appl. Phys. 64, 4909 (1988).CrossRefGoogle Scholar
19. Ellner, M., El-Boragy, M. and Predel, B., J. Less-Common Met. 114, 175 (1985).CrossRefGoogle Scholar
20. Schulz, K. J., Ph. D. Thesis, University of Wisconsin-Madison (1988).Google Scholar
21. Ivey, D. G., Zhang, L. and Jian, P., J. Mat. Sci: Mat. in Electron. 2, 21 (1991).Google Scholar
22. Knight, J. R. and Rhys, D. W., J. Less-Common Met. 1, 292 (1959).CrossRefGoogle Scholar
23. Savitsky, E. M., Polyakova, V. P., Gorina, N. B., Dostanko, A. P., Chistyakov, J. D. and Zelenkov, V. A., J. Electron. Mat. 5, 341 (1976).CrossRefGoogle Scholar
24. Wang, L. C., Wang, X. Z., Lau, S. S., Sands, T., Chan, W. K. and Kuech, T. F., Appl. Phys. Lett. 56, 2129 (1990).CrossRefGoogle Scholar
25. Wang, L. C., Wang, X. Z., Hsu, S. N., Lau, S. S., Lin, P. S. D., Sands, T., Schwartz, S. A., Plumton, D. L. and Kuech, T. F., J. Appl. Phys. 69, 4364 (1991).CrossRefGoogle Scholar
26. Kuphal, E., Solid-State Electron. 24, 69 (1981).CrossRefGoogle Scholar
27. Sands, T., Marshall, E. D. and Wang, L. C., J. Mater. Res. 3, 914 (1988).CrossRefGoogle Scholar