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MEMS Material Microstructure and Elastic Property Modeling

Published online by Cambridge University Press:  10 February 2011

Howard R. Last ,
Kevin J. Hemker  and
Ronald Witt
Howard R. Last
Affiliation:
Underwater Warheads Technology & Development Dept., Naval Surface Warfare Center, Indian Head, MD 20640, [email protected]
Kevin J. Hemker
Affiliation:
Dept. of Mechanical Engineering, The Johns Hopkins University, Baltimore, MD
Ronald Witt
Affiliation:
TexSEM Laboratories, Inc., Draper, UT
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Abstract

Results from initial efforts to develop a quantitative understanding of the material microstructure – elastic properties relationship for electroplated LIGA nickel will be presented. Microsample tensile testing and microstructural characterization results including grain size and grain orientation measurements obtained using orientation imaging microscopy (OIM) are discussed. The use of these data in the development of a finite element modeling approach to represent the mechanical response of “meso-scale” LIGA nickel MEMS material will be highlighted.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 191
Copyright
Copyright © Materials Research Society 2000

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