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Memory Characteristics of Filament Confined in Tiny ReRAM Structure

Published online by Cambridge University Press:  22 May 2013

S. G. Koh ,
K. Kinoshita ,
T. Fukuhara ,
Y. Sawai  and
S. Kishida
S. G. Koh
Affiliation:
Department of Information and Electronics, Graduate School of Engineering, Tottori University, 4-101 Koyama-Minami, Tottori 680-8552, Japan.
K. Kinoshita
Affiliation:
Department of Information and Electronics, Graduate School of Engineering, Tottori University, 4-101 Koyama-Minami, Tottori 680-8552, Japan. Tottori Univ. Electronic Display Research Center, 522-2 Koyama-Kita, Tottori 680-0941, Japan.
T. Fukuhara
Affiliation:
Department of Information and Electronics, Graduate School of Engineering, Tottori University, 4-101 Koyama-Minami, Tottori 680-8552, Japan.
Y. Sawai
Affiliation:
Department of Information and Electronics, Graduate School of Engineering, Tottori University, 4-101 Koyama-Minami, Tottori 680-8552, Japan.
S. Kishida
Affiliation:
Department of Information and Electronics, Graduate School of Engineering, Tottori University, 4-101 Koyama-Minami, Tottori 680-8552, Japan. Tottori Univ. Electronic Display Research Center, 522-2 Koyama-Kita, Tottori 680-0941, Japan.
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Abstract

Clarification of memory characteristics of tiny cell is important for practical use of resistive random access memory (ReRAM). However, limitation of semiconductor micro-fabrication technology hinders to obtain memory characteristics in tiny cell with an area comparable to the size of filaments. In this paper, we established a method to prepare a very small memory cell by fabricating ReRAM structure on the tip of a cantilever of atomic force microscope (AFM). We also established a method to avoid the overshoot of set current. As a result, reset current was successfully reduced enough to suppress serious damage to the cantilever. The effective cell size was estimated to be less than 10 nm in diameter due to electric field concentration at the tip of the cantilever, which was confirmed by an electric field simulator based on finite element method. We performed a unique experiment to verify the presence of oxygen pool in an anode, by utilizing removable bottom electrode structure. The result was not consistent with resistive switching models that require the anode to play a role as an oxygen reservoir.

Keywords

memoryoxidescanning probe microscopy (SPM)
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1562: Symposium DD – Emerging Materials and Devices for Future Nonvolatile Memories , 2013 , mrss13-1562-dd15-06
Copyright
Copyright © Materials Research Society 2013 

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References

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