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Mechanical-to-Electrical Energy Conversion of Thin-Film Piezoelectric Diaphragms

Published online by Cambridge University Press:  26 February 2011

Dylan J Morris ,
Michelle C Robinson ,
Leland W Weiss ,
Cecilia D Richards ,
Robert F Richards  and
David F Bahr
Dylan J Morris
Affiliation:
[email protected], Washington State University, Mechanical and Materials Engineering, Center for Materials Research, 102 Dana Hall, Pullman, WA, 99164-2711, United States, 509-335-2995, 509-335-4145
Michelle C Robinson
Affiliation:
[email protected], Washington State University, Mechanical and Materials Engineering, Pullman, WA, 99164, United States
Leland W Weiss
Affiliation:
[email protected], Washington State University, Mechanical and Materials Engineering, Pullman, WA, 99164, United States
Cecilia D Richards
Affiliation:
[email protected], Washington State University, Mechanical and Materials Engineering, Pullman, WA, 99164, United States
Robert F Richards
Affiliation:
[email protected], Washington State University, Mechanical and Materials Engineering, Pullman, WA, 99164, United States
David F Bahr
Affiliation:
[email protected], Washington State University, Mechanical and Materials Engineering, Pullman, WA, 99164, United States
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Abstract

A micro (∼1 cm3) dynamic heat engine, capable of producing electrical power from lowgrade heat sources, utilizes a micro-machined diaphragm with a piezoelectric element as a The electromechanical coupling of a piezoelectric diaphragm under large initial stresses and/or large deflections – in the membrane limit – is described here. A simple model is derived for electromechanical transduction of a pressurized piezoelectric membrane and an experiment is described to measure it. Electromechanical coupling initially increases as the square of the center-point deflection as the residual stress is overcome. In the limit of large pressures, the electromechanical coupling approaches a limit that is predicted by the model.

Keywords

piezoelectricmicroelectro-mechanical (MEMS)ferroelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 973: Symposium BB – Mobile Energy , 2006 , 0973-BB06-04
Copyright
Copyright © Materials Research Society 2007

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References

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