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A Mechanical Study of W and W2N Single Layers, and W2N/W Multilayers

Published online by Cambridge University Press:  10 February 2011

L. Maillé ,
C. Sant ,
P. Aubert  and
P. Garnier
C. Sant
Affiliation:
Laboratoire d'étude des Milieux Nanométriques, Université d'Evry Val d'Essonne - 91025 Evry Cedex, FRANCE.
P. Aubert
Affiliation:
Laboratoire d'étude des Milieux Nanométriques, Université d'Evry Val d'Essonne - 91025 Evry Cedex, FRANCE.
P. Garnier
Affiliation:
Laboratoire d'étude des Milieux Nanométriques, Université d'Evry Val d'Essonne - 91025 Evry Cedex, FRANCE.
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Abstract

The microstructure of W, W2N single layers and W2N/W multilayers are related to their mechanical properties. We study the hardness of multilayers as function of the period thickness. Two partial pressures of nitride (PN2 = 10 % and 50 %) for W2N deposition are investigated. For the single layers, the hardness value increases with the nitrogen partial pressure. The hardness of W2N/W multilayers using PN2 = 50% for W2N deposition increases when the layer spacing decreased. A hardness value of 19.5 GPa is reached for a multilayer with PN2 = 50% and, close to 20 GPa with PN2 = 10% for all the period studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 778: Symposium U – Mechanical Properties Derived from Nanostructuring Materials , 2003 , U7.9
Copyright
Copyright © Materials Research Society 2002

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